[proofplan]
We first prove, by transfinite induction, the auxiliary facts that every level $L_\alpha$ is transitive and that $L_\alpha \subset L_{\alpha+1}$. The successor step uses the defining property of $\operatorname{Def}(M)$: its elements are definable subsets of $M$, and parameters from $M$ may be used. Once adjacent inclusions are known at every stage, the inclusion $L_\alpha \subset L_\beta$ follows by a second transfinite induction on $\beta$, with limit stages handled by the union definition of $L_\beta$.
[/proofplan]
[step:Prove transitivity and adjacent inclusion simultaneously]
We prove by transfinite induction on the ordinal $\alpha$ the following two assertions:
\begin{align*}
\mathrm{T}(\alpha) &: \quad L_\alpha \text{ is transitive},\\
\mathrm{S}(\alpha) &: \quad L_\alpha \subset L_{\alpha+1}.
\end{align*}
Here transitivity means that for every $x \in L_\alpha$ and every $y \in x$, one has $y \in L_\alpha$.
For $\alpha = 0$, we have $L_0 = \varnothing$. Thus $L_0$ is transitive, and $L_0 \subset L_1$.
Assume now that $\alpha = \gamma + 1$ and that $\mathrm{T}(\gamma)$ and $\mathrm{S}(\gamma)$ hold. We first prove $\mathrm{T}(\gamma+1)$. Let $x \in L_{\gamma+1}$. By definition,
\begin{align*}
L_{\gamma+1} = \operatorname{Def}(L_\gamma),
\end{align*}
so $x$ is a definable subset of $L_\gamma$. Hence $x \subset L_\gamma$. Since $\mathrm{S}(\gamma)$ gives $L_\gamma \subset L_{\gamma+1}$, we obtain $x \subset L_{\gamma+1}$. Therefore $L_{\gamma+1}$ is transitive.
We next prove $\mathrm{S}(\gamma+1)$. Let $x \in L_{\gamma+1}$. Since $L_{\gamma+1}$ is transitive, $x \subset L_{\gamma+1}$. Define the formula $\varphi(u,p)$ in the language of set theory by
\begin{align*}
\varphi(u,p) \quad \text{means} \quad u \in p.
\end{align*}
Using the parameter $x \in L_{\gamma+1}$, the subset of $L_{\gamma+1}$ defined by $\varphi(u,x)$ is exactly $x$, because $x \subset L_{\gamma+1}$. Hence $x \in \operatorname{Def}(L_{\gamma+1}) = L_{\gamma+2}$. Thus $L_{\gamma+1} \subset L_{\gamma+2}$.
Finally suppose $\lambda$ is a limit ordinal and that $\mathrm{T}(\gamma)$ and $\mathrm{S}(\gamma)$ hold for every $\gamma < \lambda$. We first prove $\mathrm{T}(\lambda)$. Let $x \in L_\lambda$. By definition of the limit stage, there is some $\gamma < \lambda$ such that $x \in L_\gamma$. Since $L_\gamma$ is transitive, $x \subset L_\gamma$. Since $L_\gamma \subset L_\lambda$ by the definition
\begin{align*}
L_\lambda = \bigcup_{\delta < \lambda} L_\delta,
\end{align*}
we get $x \subset L_\lambda$. Therefore $L_\lambda$ is transitive.
We now prove $\mathrm{S}(\lambda)$. Let $x \in L_\lambda$. Since $L_\lambda$ is transitive, $x \subset L_\lambda$. Again use the formula $\varphi(u,p)$ given by $u \in p$. With parameter $x \in L_\lambda$, this formula defines precisely the subset $x$ of $L_\lambda$. Therefore
\begin{align*}
x \in \operatorname{Def}(L_\lambda) = L_{\lambda+1}.
\end{align*}
Thus $L_\lambda \subset L_{\lambda+1}$. By transfinite induction, $\mathrm{T}(\alpha)$ and $\mathrm{S}(\alpha)$ hold for every ordinal $\alpha$.
[guided]
We prove two facts at once because each one feeds the other. To show $L_\alpha \subset L_{\alpha+1}$, we want to say that an element $x \in L_\alpha$ is definable over $L_\alpha$ using itself as a parameter by the formula $u \in x$. But this only defines $x$ as a subset of $L_\alpha$ if $x \subset L_\alpha$, which is exactly transitivity. Thus we prove transitivity of each level and adjacent inclusion simultaneously.
For the base case, $L_0 = \varnothing$. The empty set is transitive because there is no $x \in \varnothing$ to check, and $\varnothing \subset L_1$.
Now let $\alpha = \gamma+1$, and assume $L_\gamma$ is transitive and $L_\gamma \subset L_{\gamma+1}$. We first show that $L_{\gamma+1}$ is transitive. If $x \in L_{\gamma+1}$, then
\begin{align*}
L_{\gamma+1} = \operatorname{Def}(L_\gamma).
\end{align*}
By definition, every element of $\operatorname{Def}(L_\gamma)$ is a subset of $L_\gamma$ definable over $L_\gamma$ with parameters from $L_\gamma$. Hence $x \subset L_\gamma$. The induction hypothesis gives $L_\gamma \subset L_{\gamma+1}$, so $x \subset L_{\gamma+1}$. This proves that $L_{\gamma+1}$ is transitive.
Next we prove $L_{\gamma+1} \subset L_{\gamma+2}$. Let $x \in L_{\gamma+1}$. Since we have just proved that $L_{\gamma+1}$ is transitive, every element of $x$ lies in $L_{\gamma+1}$, so $x \subset L_{\gamma+1}$. Consider the first-order formula
\begin{align*}
\varphi(u,p) \quad \text{means} \quad u \in p.
\end{align*}
When interpreted over $L_{\gamma+1}$ with parameter $p=x$, this formula defines exactly the subset $x$ of $L_{\gamma+1}$. The parameter is allowed because $x \in L_{\gamma+1}$. Therefore $x$ belongs to $\operatorname{Def}(L_{\gamma+1})$, which is $L_{\gamma+2}$. Since $x$ was arbitrary, $L_{\gamma+1} \subset L_{\gamma+2}$.
Now let $\lambda$ be a limit ordinal, and assume the two assertions hold below $\lambda$. If $x \in L_\lambda$, then by the limit definition
\begin{align*}
L_\lambda = \bigcup_{\gamma < \lambda} L_\gamma,
\end{align*}
there exists $\gamma < \lambda$ with $x \in L_\gamma$. By the induction hypothesis, $L_\gamma$ is transitive, so $x \subset L_\gamma$. Since $L_\gamma \subset L_\lambda$ by the same union definition, we have $x \subset L_\lambda$. Hence $L_\lambda$ is transitive.
Finally, if $x \in L_\lambda$, then transitivity of $L_\lambda$ gives $x \subset L_\lambda$. The formula $\varphi(u,p)$ meaning $u \in p$, with parameter $x \in L_\lambda$, defines $x$ over $L_\lambda$. Therefore
\begin{align*}
x \in \operatorname{Def}(L_\lambda) = L_{\lambda+1}.
\end{align*}
Thus $L_\lambda \subset L_{\lambda+1}$. This completes the simultaneous transfinite induction.
[/guided]
[/step]
[step:Iterate adjacent inclusion to compare arbitrary stages]
Fix an ordinal $\alpha$. We prove by transfinite induction on ordinals $\beta \geq \alpha$ that $L_\alpha \subset L_\beta$.
If $\beta = \alpha$, then $L_\alpha \subset L_\alpha$ by reflexivity of inclusion.
Suppose $\beta = \delta + 1$ and $\alpha \leq \delta$. By the induction hypothesis, $L_\alpha \subset L_\delta$. From the previous step, $L_\delta \subset L_{\delta+1} = L_\beta$. By transitivity of subset inclusion,
\begin{align*}
L_\alpha \subset L_\beta.
\end{align*}
Finally suppose $\beta$ is a limit ordinal and $\alpha < \beta$. Since
\begin{align*}
L_\beta = \bigcup_{\delta < \beta} L_\delta,
\end{align*}
and since $\alpha < \beta$, we have $L_\alpha \subset L_\beta$ directly from the definition of union.
Therefore, for all ordinals $\alpha$ and $\beta$, if $\alpha \leq \beta$, then $L_\alpha \subset L_\beta$.
[guided]
Once we know every adjacent inclusion $L_\delta \subset L_{\delta+1}$, the general monotonicity statement is obtained by iterating these inclusions through the ordinal interval from $\alpha$ to $\beta$.
Fix $\alpha$. We prove that $L_\alpha \subset L_\beta$ for every $\beta \geq \alpha$ by transfinite induction on $\beta$. If $\beta=\alpha$, there is nothing to build: every set is a subset of itself, so $L_\alpha \subset L_\alpha$.
Now suppose $\beta=\delta+1$ and $\alpha \leq \delta$. The induction hypothesis gives
\begin{align*}
L_\alpha \subset L_\delta.
\end{align*}
The first step of the proof gives the adjacent inclusion
\begin{align*}
L_\delta \subset L_{\delta+1}.
\end{align*}
Since $\beta=\delta+1$, transitivity of subset inclusion yields
\begin{align*}
L_\alpha \subset L_\delta \subset L_{\delta+1} = L_\beta.
\end{align*}
This proves the successor case.
It remains to handle the case where $\beta$ is a limit ordinal. If $\alpha < \beta$, then $\alpha$ is one of the indices appearing in the union defining $L_\beta$:
\begin{align*}
L_\beta = \bigcup_{\delta < \beta} L_\delta.
\end{align*}
Therefore every element of $L_\alpha$ belongs to this union, and hence $L_\alpha \subset L_\beta$. Combining the base, successor, and limit cases proves the desired monotonicity for all ordinals $\alpha \leq \beta$.
[/guided]
[/step]