[guided]Let $\mathbb{N}_0 := \mathbb{N} \cup \{0\}$ denote the set of non-negative integers, let $\mathcal P(M) := \{A : A \subset M\}$ denote the power set of $M$, and let $\aleph_0 := |\mathbb{N}|$ denote the cardinality of the natural numbers. For a sequence of sets $(A_n)_{n \in \mathbb{N}_0}$, the notation $\bigcup_{n=0}^{\infty} A_n$ denotes the union indexed by all $n \in \mathbb{N}_0$.
The definition of $\operatorname{Def}(\mathcal M)$ says that a definable subset is produced by three pieces of finite data: a natural number $n$, a [first-order formula](/page/First-Order%20Formula) with one variable $x$ reserved for the element being tested, and an $n$-tuple of parameters from $M$. We package all such data into one set.
For each $n \geq 0$, let $\Phi_n$ be the set of formulas $\varphi(x,y_1,\dots,y_n)$ in the language $\{\in\}$ whose free variables are among $x,y_1,\dots,y_n$. The parameter choices for such a formula form $M^n$. In the case $n=0$, there are no parameters, and we use the convention $M^0=\{()\}$.
Thus the full set of possible defining data is
\begin{align*}
C := \bigcup_{n=0}^{\infty} \left(\Phi_n \times M^n\right).
\end{align*}
Now define
\begin{align*}
F: C &\to \mathcal P(M) \\
(\varphi,a_1,\dots,a_n) &\mapsto \{x \in M : \mathcal M \models \varphi(x,a_1,\dots,a_n)\}.
\end{align*}
This map sends each formula together with its parameters to the subset of $M$ that it defines. Different elements of $C$ may define the same subset, so $F$ need not be injective. We only need surjectivity onto $\operatorname{Def}(\mathcal M)$: by definition, every member of $\operatorname{Def}(\mathcal M)$ arises from some formula and some finite tuple of parameters. Therefore
\begin{align*}
\operatorname{Def}(\mathcal M) \subseteq F(C),
\end{align*}
and consequently
\begin{align*}
|\operatorname{Def}(\mathcal M)| \leq |C|.
\end{align*}[/guided]