[guided]We fix a direction $\phi \in H^1_0(\Omega)$ and reduce the variational problem to a one-dimensional calculus problem. The admissible perturbations are
\begin{align*}
u_\varepsilon+t\phi \in H^1_0(\Omega)
\end{align*}
for $t \in \mathbb{R}$, because $H^1_0(\Omega)$ is a vector space. Define
\begin{align*}
g_\phi: \mathbb{R} &\to \mathbb{R}
\end{align*}
by
\begin{align*}
g_\phi(t)=I_\varepsilon[u_\varepsilon+t\phi].
\end{align*}
Since $u_\varepsilon$ minimizes $I_\varepsilon$, the function $g_\phi$ has a minimum at $t=0$. We do not need to quote a separate one-variable theorem here: for $h>0$, minimality gives $(g_\phi(h)-g_\phi(0))/h\geq 0$, and for $h<0$, minimality gives $(g_\phi(h)-g_\phi(0))/h\leq 0$. Therefore, if $g_\phi$ is differentiable at $0$, the common two-sided limit of these quotients must be $g_\phi'(0)=0$.
The Dirichlet term is quadratic in $t$. Expanding the integrand gives
\begin{align*}
|\nabla u_\varepsilon+t\nabla\phi|^2
=
|\nabla u_\varepsilon|^2
+
2t\,\nabla u_\varepsilon\cdot\nabla\phi
+
t^2|\nabla\phi|^2.
\end{align*}
Since $\nabla u_\varepsilon,\nabla\phi \in L^2(\Omega;\mathbb{R}^n)$, the product $\nabla u_\varepsilon\cdot\nabla\phi$ belongs to $L^1(\Omega)$ by the [Cauchy-Schwarz inequality](/theorems/432). Hence
\begin{align*}
\frac{d}{dt}\bigg|_{t=0}
\frac{1}{2}\int_\Omega |\nabla u_\varepsilon+t\nabla\phi|^2\,d\mathcal{L}^n(x)
=
\int_\Omega \nabla u_\varepsilon\cdot\nabla\phi\,d\mathcal{L}^n(x).
\end{align*}
The load term is linear in $t$. Since $f,\phi \in L^2(\Omega)$, the product $f\phi$ belongs to $L^1(\Omega)$, and therefore
\begin{align*}
\frac{d}{dt}\bigg|_{t=0}
\left(
-\int_\Omega f(u_\varepsilon+t\phi)\,d\mathcal{L}^n(x)
\right)
=
-\int_\Omega f\phi\,d\mathcal{L}^n(x).
\end{align*}
The penalty term is the only point requiring a convergence argument. Let
\begin{align*}
w_\varepsilon: \Omega &\to \mathbb{R}
\end{align*}
be defined by
\begin{align*}
w_\varepsilon(x)=u_\varepsilon(x)-\psi(x).
\end{align*}
Then $w_\varepsilon \in H^1(\Omega)\subset L^2(\Omega)$. For $t\neq 0$, define
\begin{align*}
Q_t: \Omega &\to \mathbb{R}
\end{align*}
by
\begin{align*}
Q_t(x)=\frac{B_\varepsilon(w_\varepsilon(x)+t\phi(x))-B_\varepsilon(w_\varepsilon(x))}{t}.
\end{align*}
For each point $x$ where $w_\varepsilon(x)$ and $\phi(x)$ are finite, we apply the one-dimensional [Fundamental Theorem of Calculus](/theorems/632) to the $C^1$ function $r \mapsto B_\varepsilon(w_\varepsilon(x)+r\phi(x))$ on the interval between $0$ and $t$, using $B_\varepsilon'=\beta_\varepsilon$. This gives an integral over the variable $r$. We then set $r=\theta t$, so $\theta$ ranges over $[0,1]$ and one-dimensional Lebesgue measure transforms as $d\mathcal{L}^1(r)=|t|\,d\mathcal{L}^1(\theta)$, with the orientation encoded by the factor $1/t$ in the difference quotient. Hence
\begin{align*}
Q_t(x)=\phi(x)\int_0^1 \beta_\varepsilon(w_\varepsilon(x)+\theta t\phi(x))\,d\mathcal{L}^1(\theta).
\end{align*}
As $t\to 0$, continuity of $\beta_\varepsilon$ gives the pointwise limit
\begin{align*}
Q_t(x)\to \beta_\varepsilon(w_\varepsilon(x))\phi(x)
\end{align*}
for $\mathcal{L}^n$-a.e. $x \in \Omega$.
To pass this pointwise limit through the integral, we need an $L^1$ majorant independent of small $t$. Let $L_\varepsilon$ be a global Lipschitz constant for $\beta_\varepsilon$. Since $\beta_\varepsilon(0)=0$, we have
\begin{align*}
|\beta_\varepsilon(s)|\leq L_\varepsilon |s|
\end{align*}
for every $s \in \mathbb{R}$. Therefore, for $|t|\leq 1$,
\begin{align*}
|Q_t(x)|
\leq
|\phi(x)|\int_0^1 L_\varepsilon |w_\varepsilon(x)+\theta t\phi(x)|\,d\mathcal{L}^1(\theta).
\end{align*}
Using $|w_\varepsilon(x)+\theta t\phi(x)|\leq |w_\varepsilon(x)|+|\phi(x)|$, we obtain
\begin{align*}
|Q_t(x)|
\leq
L_\varepsilon |\phi(x)|\,|w_\varepsilon(x)|
+
L_\varepsilon |\phi(x)|^2.
\end{align*}
This majorant belongs to $L^1(\Omega)$ because $w_\varepsilon,\phi \in L^2(\Omega)$ and products of $L^2$ functions are $L^1$ by the [Cauchy-Schwarz inequality](/theorems/432). The [Dominated Convergence Theorem](/theorems/4) applies and yields
\begin{align*}
\frac{d}{dt}\bigg|_{t=0}
\int_\Omega B_\varepsilon(w_\varepsilon+t\phi)\,d\mathcal{L}^n(x)
=
\int_\Omega \beta_\varepsilon(w_\varepsilon)\phi\,d\mathcal{L}^n(x).
\end{align*}[/guided]