[step:Control the good frequency contribution by combining microlocal decay with a finite order distribution estimate]
The distribution $\chi u$ is compactly supported. Hence there are a compact set $K_\chi\subset U$, an integer $s\geq0$, and a constant $A_s>0$ such that $\operatorname{supp}(\chi u)\subset K_\chi$ and
\begin{align*}
|(\chi u)(f)|\leq A_s\sum_{|\alpha|\leq s}\sup_{x\in K_\chi}|D^\alpha f(x)|
\end{align*}
for every $f\in C^\infty(U)$. Its Fourier transform $\widehat{\chi u}:\mathbb{R}^n\to\mathbb{C}$ is therefore a smooth function of at most polynomial growth. Since $-\operatorname{supp}\rho\subset\Gamma_\xi$, the microlocal smoothness estimate gives: for every integer $S\geq0$ there is $A_S>0$ such that
\begin{align*}
|\widehat{\chi u}(-\xi)|\leq A_S(1+|\xi|)^{-S}
\end{align*}
whenever $\rho(\xi)\neq0$.
The function $b_\eta$ is smooth and compactly supported in the fixed compact set $K:=\kappa(\operatorname{supp}\psi)$. For each $\eta\in\Gamma_\eta$, define the smooth map
\begin{align*}
\zeta_\eta:K&\to\mathbb{R}^n_0
\end{align*}
\begin{align*}
x&\mapsto (d\kappa^{-1}_x)^\top\eta.
\end{align*}
Define the closed stationary-frequency set
\begin{align*}
Z_\eta:=\{-\zeta_\eta(x):x\in K\}\subset\mathbb{R}^n_0.
\end{align*}
The set $Z_\eta$ records the stationary frequencies of $\widehat{b_\eta}$. The cone construction gives $\zeta_\eta(x)\in\Sigma_\xi$, and compactness of $K$ gives constants $0<m_0\leq M_0<\infty$ such that
\begin{align*}
m_0|\eta|\leq |\zeta_\eta(x)|\leq M_0|\eta|
\end{align*}
for every $x\in K$ and $\eta\in\Gamma_\eta$.
We justify the Fourier representation in the distributional pairing by first inserting a radial cutoff. Let $\theta\in C_c^\infty(\mathbb{R}^n)$ satisfy $0\leq\theta\leq1$ and $\theta=1$ on $B(0,1)$, and define $\theta_R:\mathbb{R}^n\to[0,1]$ by $\theta_R(\xi)=\theta(\xi/R)$ for $R\geq1$. Define the smooth compactly supported Fourier-cutoff regularisation
\begin{align*}
b_{\eta,R}^{\mathrm{good}}:U&\to\mathbb{C}
\end{align*}
\begin{align*}
x&\mapsto (2\pi)^{-n}\int_{\mathbb{R}^n}\theta_R(\xi)\rho(\xi)\widehat{b_\eta}(\xi)e^{ix\cdot\xi}\,d\mathcal{L}^n(\xi).
\end{align*}
Fourier inversion for compactly supported smooth functions gives $b_{\eta,R}^{\mathrm{good}}\to b_\eta^{\mathrm{good}}$ in $C^s(K_\chi)$ as $R\to\infty$, because repeated [integration by parts](/theorems/2098) in the compact support of $b_\eta$ gives rapid decay of $\widehat{b_\eta}(\xi)$ in $\xi$ uniformly for $\eta$ in compact angular subsets of $\Gamma_\eta$. The finite-order estimate for $\chi u$ therefore permits passage to the limit. For each finite $R$, the definition of the Fourier transform of the compactly supported distribution $\chi u$ gives
\begin{align*}
(\chi u)(b_{\eta,R}^{\mathrm{good}})=(2\pi)^{-n}\int_{\mathbb{R}^n}\theta_R(\xi)\rho(\xi)\widehat{b_\eta}(\xi)\widehat{\chi u}(-\xi)\,d\mathcal{L}^n(\xi).
\end{align*}
On the support of $\rho$ with $|\xi|\geq1$ we have $-\xi\in\Gamma_\xi$, so the microlocal estimate gives rapid decay of $\widehat{\chi u}(-\xi)$. On $|\xi|<1$ the Fourier transform $\widehat{\chi u}$ is smooth and hence bounded. Combining these bounds with the rapid decay of $\widehat{b_\eta}$ in $\xi$ gives an integrable dominating function independent of $R$ once the decay order is chosen larger than $s+n+N+1$. The [dominated convergence theorem](/theorems/4) then yields
\begin{align*}
(\chi u)(b_\eta^{\mathrm{good}})=(2\pi)^{-n}\int_{\mathbb{R}^n}\rho(\xi)\widehat{b_\eta}(\xi)\widehat{\chi u}(-\xi)\,d\mathcal{L}^n(\xi).
\end{align*}
We derive the parameter-dependent integration-by-parts estimate for the phase $x\mapsto \kappa^{-1}(x)\cdot\eta+x\cdot\xi$. The Fourier transform of $b_\eta$ is
\begin{align*}
\widehat{b_\eta}(\xi)=\int_K \psi(\kappa^{-1}(x))|\det d\kappa^{-1}_x|e^{-i(\kappa^{-1}(x)\cdot\eta+x\cdot\xi)}\,d\mathcal{L}^n(x).
\end{align*}
For fixed $\eta\in\Gamma_\eta$ and $\xi\in\mathbb{R}^n$, define
\begin{align*}
G_{\eta,\xi}:K&\to\mathbb{R}^n
\end{align*}
\begin{align*}
x&\mapsto \zeta_\eta(x)+\xi.
\end{align*}
Since $K$ is compact and $\zeta_\eta$ depends linearly on $\eta$, there is a constant $c_2>0$ such that
\begin{align*}
\sup_{x\in K}|G_{\eta,\xi}(x)|\geq c_2\operatorname{dist}(\xi,Z_\eta).
\end{align*}
On a finite [partition of unity](/page/Partition%20of%20Unity) of $K$, choose a coordinate direction in which the corresponding component of $G_{\eta,\xi}$ has size comparable to $\operatorname{dist}(\xi,Z_\eta)$, and integrate by parts with the one-dimensional operator obtained by dividing by that component. Derivatives falling on $G_{\eta,\xi}$ and on the amplitude are bounded by powers of $1+|\eta|+|\xi|$ because all derivatives of $\kappa^{-1}$ are bounded on $K$. Therefore, for every pair of integers $M,L\geq0$, after increasing $L$ if necessary, there is $B_{M,L}>0$ such that
\begin{align*}
|\widehat{b_\eta}(\xi)|\leq B_{M,L}(1+|\eta|+|\xi|)^L(1+\operatorname{dist}(\xi,Z_\eta))^{-M}
\end{align*}
for all $\eta\in\Gamma_\eta$ and $\xi\in\mathbb{R}^n$.
Split the integral into $|\xi|\geq (m_0/2)|\eta|$ and $|\xi|<(m_0/2)|\eta|$. On the first region, the rapid decay of $\widehat{\chi u}(-\xi)$ gives a factor bounded by a constant multiple of $(1+|\eta|)^{-S}$, and choosing $S$ larger than $L+n+N+1$ gives a contribution bounded by $C_N(1+|\eta|)^{-N}$. On the complementary region, every point of $Z_\eta$ has norm at least $m_0|\eta|$, so $\operatorname{dist}(\xi,Z_\eta)\geq (m_0/2)|\eta|$; choosing $M$ larger than $L+n+N+1$ gives the same bound. Therefore, for every integer $N\geq0$, there exists $C_N^{\mathrm{good}}>0$ such that
\begin{align*}
|(\chi u)(b_\eta^{\mathrm{good}})|\leq C_N^{\mathrm{good}}(1+|\eta|)^{-N}
\end{align*}
for every $\eta\in\Gamma_\eta$.
[/step]